Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science
arXiv:2609.12139v1 Announce Type: new Abstract: Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and...
Read more: https://arxiv.org/abs/2609.12139
Scan with your phone
Scan with your phone